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Mass production of FeRAM-LSI has been realized by using our newly produced system developed by industry-university co-operation.
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Material developed by Electronic Material Society | ||||||||
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| For the first time in the world, WACOM Electric Co., Ltd. (currently WACOM Research and
Development, the president being Masaki Kusuhara) has accomplished the MOCVD system
intended for ferroelectrics thin film deposition for mass production of FeRAM.
(Distributor is M. Watanabe & Co., Ltd.) For realization of this completely new MOCVD system, WACOM R and D and Dr. Toda of YamagataUniversity, under assistance of M. Watanabe & Co., Lted., worked together to develop a unique mechanism which was not found in the usual CVD system. Details of this new mechanism were reported at the domestic and foreign Applied Physics Societies and ISIF* to be highly evaluated. ISIF - International Symposium on Integrated Ferroelectrics |
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| A remarkable property of this system is the high quality liquid supplying system and evaporation system (both internationally patented) developed by co-operation of M. W., WACOM Electric Co., Ltd. (currently WACOM Research and Development), and Dr. Masayuki Toda, the professor of Yamagata University, the department of engineering. Adoption of the high quality liquid supplying system resulted in a minimized dead space and automatic cleaning system. By this evaporation system, with its particular structure, the material liquid is efficiently evaporated, which prevents a nozzle from clogging up and enables continuous operation. | |||||||||
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Specifications |
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| Material developed by Electronic Material Society |
Patents |
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